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Optical coating process
Release time:
2024-04-11 10:19
The optical coating is realized in a high vacuum coating chamber. Traditional optical coating processes require elevated substrate temperatures (typically around 300°C), while more advanced techniques, such as ion-assisted deposition (IAD), can be carried out at room temperature. The IAD process can not only produce films with better physical properties than the regular coating process, but it can also be applied to substrates made of plastic.
Control modules for electron beam evaporation, IAD deposition, light control, heater control, vacuum control and automatic process control are all on the front panel of the coater. Optical coating Two electron gun sources are located on both sides of the substrate, surrounded by an annular cover and covered by a baffle. The ion source is in the middle and the light control window is in front of the ion source.
The use of planetary systems for optical coating is a way to ensure that the evaporated material is evenly distributed in the fixture area. The fixture rotates about a common axis while rotating about its own axis. The optically coated light control and crystal control are located in the middle of the planetary drive mechanism, while the drive shaft shields the crystal control. The large opening on the back leads to an additional high vacuum pump. The substrate heating system consists of 4 quartz lamps, two on each side of the vacuum chamber.
The conventional method of optical coating deposition is thermal evaporation, or the use of a resistance heating evaporation source or an electron beam evaporation source. The characteristics of the optical coating depend mainly on the energy of the deposited atoms. The ion source directs the ion beam from the ion gun to the substrate surface and the growing optical coating to improve the optical coating characteristics of conventional electron beam evaporation.
The properties of optical coatings, such as refractive index, absorptivity, and laser damage threshold, depend primarily on the microstructure of the film. Optical coating materials, residual gas pressure, and substrate temperature can all affect the microstructure of the film. If the mobility of the vapor deposited atoms on the substrate surface is low, the optical coating will contain micropores. When the film is exposed to humid air, these pores are gradually filled with water vapor.
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